故每個點的絕緣程度也不同，但 Process 時的相對電漿絕緣程度是表

故每個點的絕緣程度也不同，但 Process 時的相對電漿絕緣程度
是表面對表面，故需得知 Susceptor 表面各點對點皆無導通現象，
線所以用一端接 Ground，一端裝治具的方式找出絕緣處較差的點，再以該點作基準點檢測表面。

結果 (英文) 1:

Insulation level varies for each point, but the Process of relative plasma insulation levelSurface to surface, it takes that Susceptor no conduction phenomena in the point to point on the surface,Line end Ground, side mounted fixture find poor insulation, then do benchmark testing surface at that point.

結果 (英文) 2:

Therefore, the degree of insulation of each point is different, but the relative degree of insulation Process When the plasma
surface to surface, it is required that the surface of each point Susceptor are no conduction phenomena,
line it with a termination Ground, one end of the loaded fixture find a way the poor insulation at the point, and then to the point as a reference point detection surface.

結果 (英文) 3:

so each point of the insulation level is different, but process relative plasma insulation degree
is surface to surface. Thus, it is necessary that Susceptor surface each point to point Nix guided through,
lines with one end connected to the ground, is installed at one end of a fixture at poor insulation is found out, to the point as reference point detection surface.