依照 Recipe95 參數設定，使用轉速計量測 (每年6月及12月)

依照 Recipe95 參數設定，使用轉速計量測 (每年6月及12月)(將轉速貼紙黏貼於 wafer 邊緣並傳輸到 chuck 上後並使用轉速計對準黏貼處開啟轉速計測試)。

結果 (英文) 1:

In accordance Recipe95 parameter setting, using the measured speed measurement (June each year and December) (the rotational speed and stickers affixed to the edge of wafer chuck to transport and after the use of adhesive at the alignment tachometer tachometer open test).

結果 (英文) 2:

According to the Recipe95 parameter settings, use the speed measurement measure (June and December of each year) (apply the speed sticker to the edge of the wafer and transfer it to chuck and use the tachometer to turn on the tachometer test).

結果 (英文) 3:

According to the recipe95 parameter setting, use the tachometer (June and December every year) (stick the tachometer sticker on the edge of wafer and transfer it to chuck, and then use the tachometer to align with the stick to start the tachometer test).