9/16 工事Summary:
1. Cleaner&PA SIZE Check -- Done
2. Cleaner&PA Utilitly 位置,点数,接头确认 -- Done
3. Cleaner&PA IDlE RUN 30MIN机构动作测试,流片动作确认 -- Done
4. Cleaner破片,刮伤及洗净效果确认 -- On going
5. PA贴片机POL Alignment&Panel Alignment确认,撕膜动作确认 -- Done
6. 其它Phase I曾发生过残件平行展开Review -- Done
9/17 工事Plan
1. Cleaning研磨效果及刮伤DOE;
2. PA精度DOE;