4. Susceptor 表面陽極絕緣度檢測 4-1. 一端接 Gr

4. Susceptor 表面陽極絕緣度檢測
4-1. 一端接 Ground，一端裝治具於表面測試。
若有任何 1 點檢測異常續往下執行下述步驟
(如圖 7)

4-2. 另一探針裝上檢測治具。


4-3. 確認兩裝置皆安裝妥善。(如圖 8)

(兩治具接觸需為 Short 狀態。)
" 4-4. 以檢測出表面絕緣度較差的點為基準，
做表面量測。一定需為 OL (如圖 9)"

結果 (英文) 1:

4. the Susceptor Anodic insulation measurement 4-1. end Ground, side mounted fixtures in tests on the surface. 1 point if there is any abnormal continued down performs the following steps (See Figure 7) 4-2. the test fixture on the other probe loading. 4-3. recognizes that the two devices are installed properly. (See Figure 8) (Two fixtures contact for Short State. )"4-4. the detected surface insulation low point as the benchmark, Surface measurement. Must for the OL (Figure 9) "

結果 (英文) 2:

4. Susceptor surface of the anode insulation detection
4-1 A termination Ground, one end mounted on the surface of the test fixture.
1:00 If any abnormality is detected continued down the implementation of the following steps
(Figure 7) 4-2. Another probe is mounted on the detector fixture. 4-3. Ensure that the two devices are installed properly. (Figure 8) (two fixtures required for the Short contacting state.) "4-4. In poor detection of the surface of the insulating degree as a benchmark for surface measurements. necessarily need to OL (Figure 9). "

結果 (英文) 3:

4 Susceptor surface anodic detection of
4-1. is connected to Ground, with one end on the surface of the test fixture. If there is any
1 point detection of abnormal continued down to carry out the steps (Figure 7)


4-2. another probe installed on the test fixture.



4-3. confirm that the two device is installed properly. (Figure 8)

(two fixture contact required for the Short state.
"4-4. to detect the low degree of insulation on the point of reference,
do surface measurement. Must be OL (Figure 9)